SpletPlasma Etching; Plasma Etching (PE) dapat juga disebut chemical dry etching (CDE). Kelebihan dari metode ini adalah permukaan wafer tidak akan tereduksi oleh akselerasi dari ion. Salah satu type reactor dari plasma etching ditunjukkan dalam Gambar 5. etching) dan beberapa partikel radikal akan bereaksi secara kimia dengan permukaan wafer. SpletPlasma etching is a form of plasma processing used to fabricate integrated circuits. It involves a high-speed stream of glow discharge ( plasma) of an appropriate gas mixture …

Vacuum Plasma Plasma Etch, Inc.

The PE-100 is a complete plasma treatment solution capable of reactive ion etching, plasma functionalization, and more. This model is perfect for manufacturers, medical facilities, universities, research facilities, or any other company in need of a cost-effective, production-grade plasma processing solution. The convenient chamber size, along ... SpletThe PE-100 is a complete plasma treatment solution capable of plasma cleaning, plasma etching, reactive ion etching, and more. This model is available in one of three possible … texas worksource.com

PE 100 - Trident

Splet1) Plasma Cleaning/Plasma Etching 2) Reactive Ion Etching (RIE) 3) Convertible Configuration – Includes both isotropic and anisotropic plasma processing in a single … Splet그래서 제 생각에는 저희 연구실의 플라즈마 장비는 oxford plasma lab 80+ 로써 RIE etcher 의 한 종류이지만, 사실은 PMMA 를 O2 플라즈마로 etching 하는 것이 RIE 보단 Physical etching 에 가깝기에, 결국은 같은 플라즈마 조건이라도 … SpletPlasma Etch, Inc. has been a leader, innovator, and producer of plasma technology since 1980. We've developed a wide range of solutions for plasma cleaning, plasma etching, … sword and shield types